Quasi-3D structures: Stacked with metal or insulation layers structures with same or different materials.

General design rules :

 Substrate dimension: 6” square

 General line/spacing : 10 microns/10 microns

 R-angle diameter > 3 microns

 Single layer structure:

• Thickness: 10 microns to 100 microns
• Aspect Ratio up to 4:1 (dependant to critical dimensions)
• Surface TTV: < 2 microns 
• Side wall angle < 3 degree