General design rules :
Substrate dimension: 6” square
General line/spacing : 10 microns/10 microns
R-angle diameter > 3 microns
Single layer structure:
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Thickness: 10 microns to 100 microns
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Aspect Ratio up to 4:1 (dependant to critical dimensions)
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Surface TTV: < 2 microns
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Side wall angle < 3 degree
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